電気学会全国大会講演要旨
3-146
Multi-Patterning with Numerical Optimization for DMD-Based Three-Dimensional Lithography
Xiaoxu Ma・Yoshiki Kato(Kyoto University)・Floris Kempen(TU Delft)・◎Yoshikazu Hirai・Toshiyuki Tsuchiya(Kyoto University)・Fred Keulen(TU Delft)・Osamu Tabata(Kyoto University)
We report a multi-patterning approach utilizing digital-micromirror-device (DMD)-based 3D lithography, providing a solution to improve fabrication accuracy for entire target three-dimensional structure. Because DMD-based lithography system consists a projection lens system, better resolution can be obtained around focal position comparing to the outer region of depth of focus. Thus, for thick-film resist microstructuring, exposing with multiple focal positions with separate grayscale masks leads to improvement of fabrication accuracy. In order to find the best combination of the multiple focal positions and their grayscale masks, the computational optimization is combined to the proposed approach. Through a several experiments, effectiveness of the proposed approach was successfully demonstrated.